Product Details

The “VD-500CT” is a device that uses a decompression chamber to dry glass substrates following application of resist coating.

Also, this device provides a system that enables measurements of substrate surface temperature during decompression drying as well as camera-based monitoring of substrate surfaces.

[Main Specifications]

○Chamber: Dimensions 550mm × 600mm; Height 75mm (When lid is closed)

○Hot plate: 480mm × 400mm; Made of aluminum; Max. 150℃±3℃ (When 100℃)

○Vacuum: Max. vacuum level approx. 5Pa; Uses air-cooled, dry vacuum pump

Product Specifications

○Chamber: Dimensions 550mm × 600mm; Height 75mm (When lid is closed)

○Hot plate: 480mm × 400mm; Made of aluminum; Max. 150℃±3℃ (When 100℃)

○Vacuum: Max. vacuum level approx. 5Pa; Uses air-cooled, dry vacuum pump

○Temperature measurement: Uses IR radiation thermometer; Measurement accuracy roughly ±3℃

○Camera monitoring: Zoomed monocular tube with 0.6～4.5 magnification; 1/3” CCD color camera

○Utilities: 3ΦAC200:N2 100L/min or more; Air 0.5MPa

○External dimensions: 1,150mm wide × 1,000mm long × 770mm tall

*May vary depending on the specifications.

○Camera, IR, etc. are optional

*The above items can be changed depending on the specifications requested.