Product Details

The “VD-400” is a device that uses a decompression chamber to dry glass substrates following application of resist coating.

It is designed with a butterfly valve, which enables vacuum exhaust capabilities to be set.

[Main Specifications]

○Chamber: External dimensions 400mm × 400mm; Height 103mm (When lid is closed) Inner dimensions: 350mm × 350mm; height 30mm

○Vacuum system: Max. vacuum level 1Pa or less (No sample)Dry pump 250L/S

Product Specifications

○Chamber: External dimensions 400mm × 400mm; Height 103mm (When lid is closed)

Inner dimensions 350mm × 350mm; Height 30mm

○Vacuum system: Max. vacuum level 1Pa or less (No sample)Dry pump 250L/S

○Decompression methods: Compression mode – Automatic atmospheric release once set pressure is reached Time mode – Automatic release after decompressing for a set amount of time

○Utilities: 3ΦAC200; Dry air 0.4～0.6MPa; Vacuum exhaust

○External dimensions: 1,000mm wide × 800mm long × 1,600mm tall　

○Device weight: Approx. 250Kg

*The above items can be changed depending on the specifications requested.