Product Details

A high-illumination exposure device compatible with glass panes up to 150mm × 150mm.

The “Parallel Light Exposure Device” uses a high-precision parallel light source and precision stages to expose glass substrates, and the split side mask enables manual 8-divided multiple-surface exposure.

This is a high-illumination exposure device compatible with glass panes up to 150mm × 150mm.

[Features]

○Operation controls are available in a switch-type and touch panel-type.

○Exposure gap set to between 0 and 300μｍ

○Mask holders can be exchanged to be compatible with masks up to 6in in size. 

Product Specifications

○Glass dimensions: 150mm × 150mm (Max.) × 0.5～１mmt　

*May vary depending on specifications.

○Exposure surface illumination intensity: Super high-pressure mercury lamp 2kW, 40mW/cm² or higher

○Light ray parallelism: Collimation half-angle of 2.0°; Declination angle of 0.5° or less

○Gap setting resolution: 0～300μｍ、±2μｍ

○Utilities: AC200V 50/60Hz; Air roughly 0.5MPa

○Lamp house exhaust: 5m²/min

○External dimensions: 1100mm wide × 1290mm long × 2175mm tall

*May vary depending on the specifications.

*The above items can be changed depending on the specifications requested.